拿騷 PVD 鍍膜及真空鍍膜設備

等離子電源供應器

  • 拿騷 PVD 鍍膜及真空鍍膜設備
  • 組件與零件
  • 等離子電源供應器
  • 等離子電源供應器

    • Product Specifications

    Items
    DC (1Ch)DC (2Ch)
    EnerStream 5EnerStream 10EnerStream 10HEnerStream 20EnerStream 20HEnerStream 30EnerStream 30HEnerStream 60EnerStream 5DEnerStream 10D
    Input3⌀ 208V/ 220V/ 380V3⌀ 208V/ 220V/ 380V3⌀ 208V/ 220V/ 380V3⌀ 220V/ 380V3⌀ 220V/ 380V3⌀ 380V/ 440V3Φ⌀ 440V3⌀ 440V3⌀ 380V3⌀ 380V
    lgnition Voltage1500V1500V1500V1500V1500V1500V1500V1500V1500V1500V
    Output800V, 6.25A / 400V, 12.5A800V, 12.5A / 400V, 25A1000V, 10A / 500V, 20A800V, 25A/ 400V, 50A1000V, 20A / 500V, 40A800V, 37.5A / 400V, 75A1200V, 25A / 545V, 55A900V, 66.6A / 400V, 150A800V, 6.25A / 400V, 12.5A800V, 12.5A/ 400V, 25A
    Output PowerDC 5kWDC 10kWDC 10kWDC 20kWDC 20kWDC 30kWDC 30kWDC 60kWDC 5kW + 5kWDC 10kW + 10kW
    Arc EnergyLess than 0.5mJ/kWLess than 0.2mJ/kWLess than 0.5mJ/kW
    InterfaceRS-232 / RS-485(Option: DeviceNet, ProfiBus)
    Size(mm)133(H) x 483(W) x 605(D)133(H) x 483(W) x 605(D)133(H) x 483(W) x 605(D)133(H) x 483(W) x 605(D)133(H) x 483(W) x 605(D)177(H) x 483(W) x 655(D)177(H) x 483(W) x 655(D)309(H) x 483(W) x 783(D)133(H) x 483(W) x 655(D)133(H) x 483(W) x 655(D)
    Weight(kg)24.524.524.530.530.538.838.8803232
    CoolingAir-Cooled
    ※ Cable Duct + 129mm ※ Specifications subject to change without notice

    Pulsed DC Waveform to Maximize Dionization

    • Benefits
      Rapid increase of current induced by change in reignition voltage : 700V → 1000V
    • Adjustable reignition voltage : 50V ~ 300V

    Product Specifications

    ItemsReverse Boltage FixedReverse Voltage AdjustableReverse Voltage Fixed
    EnerPulse 5EnerPulse 10EnerPulse 10LVEnerPulse 10MEnerPulse 20EnerPulse 15NEnerPulse 20NEnerPulse 30Pulse 20
    (ES20 + PG20)    		Pulse 30
    (ES30 + PG30)    		Pulse 40
    (2 x ES20 + PG40)
    Input3Φ
    208V/ 220V/ 380V    		3Φ
    208V/ 220V/ 380V    		3Φ
    380V    		3Φ
    380V    		3Φ
    220V/ 380V/ 440V    		3Φ
    440V    		3Φ
    220V/ 440V    		3Φ
    208V/ 440V    		3Φ
    220V/ 380V    		3Φ
    380V/ 440V    		3Φ
    220V/ 380V
    lgnition Voltage1500V1500V1500V1500V1200V1200V1200V1200V1500V1500V1500V
    Output800V, 6.25A / 400V, 12.5A800V, 12.5A / 400V, 25A650V, 15.4A / 300V, 33.A800V, 12.5A/ 400V, 50A650V, 30A / 400V, 50A1000V, 15A / 500V, 40A900V, 22.2A / 500V, 40A900V, 33.3A / 400V, 75A800V, 25A / 400V, 50A800V, 37.5A/ 400V, 75A800V, 50A/ 400V, 100A
    Output PowerUnipolar Pulse 5kWUnipolar Pulse 10kWUnipolar Pulse 10kWUnipolar Pulse 10kWUnipolar Pulse 20kWUnipolar Pulse 15kWUnipolar Pulse 20kWUnipolar Pulse 30kWUnipolar Pulse 20kWUnipolar Pulse 30kWUnipolar Pulse 40kW
    Output Frequency20 ~ 150 kHz5 ~ 350 kHz20 ~ 100 kHz20 ~ 350 kHz20 ~ 150 kHz40 ~ 100 kHz40 ~ 80 kHz
    Reverse TimeDc mode, 1.0us ~ 10usDC mode, 1.0us ~ 5usDC mode, 1.0us ~ 8usDC mode, 1.0us ~ 5us
    Arc EnergyLess than 1mJ/kWLess than 0.5mJ/kWLess than 1mJ/kW
    InterfaceRS-232 / RS-485(Option: DeviceNet, ProfiBus)
    Size(mm)133(H) x 483(W) x 605(D)133(H) x 483(W) x 605(D)133(H) x 483(W) x 605(D)133(H) x 483(W) x 605(D)177(H) x 483(W) x 700(D)177(H) x 483(W) x 782(D)221.25(H) x 483(W) x 700(D)309(H) x 483(W) x 782(D)133(H) x 483(W) x 605(D)_PG133(H) x 483(W) x 605(D)_PG133(H) x 483(W) x 605(D)_PG
    Weight(kg)29.529.529.529.540425073283232
    CoolingAir-Cooled

    ※ Cable Duct + 129mm
    ※ Specifications subject to change without notice

    Bipolar Pulsed DC Power Supplis for Dual Magnetron Sputtering & PECVD

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