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Industrial Upgrading Equipment First

Intelligent leadership in industrial upgrading

P系列DLC真空镀膜机

P Series DLC Vacuum Coating Machines

product & project

The Naxau P-Series PVD Vacuum Deposition Systems are designed on the Naxau SPARK platform, which features the key technologies of CVC (Continuously Variable Cathode) and UFC (Ultra Fine Cathode) arc cathodes.
Highly flexible and one of the most reliable production outputs in the industry. Multiple plasma technologies can be compounded on one machine

  • Based on APC arc technology
  • SET etching technology
  • Higher plating rate for multilayer nanocomposite structure coatings
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P Series Standard DLC Vacuum Coating Equipment

PeCVD – DLC | GLC | ta-C | DLC-x
P850P1200P1600
Effective size of plasma [mm]D680x850D680x1200D800x1600
Load capacity [kg]5008001200
PVD technology CFS ® , PECVD CFS ® , PECVD CFS ® , PECVD
Etching technologySET®SET®SET®
Number of cathodes446
Coating time [h]　10-12h　10-12h　10-12h
Coating hardness [hv]1200-25001200-25001200-2500
Roughness Ra[um]＜0.05＜0.05＜0.05
Binding force – scratch[N]＞30，＞20＞30，＞20＞30，＞20
Coating typeCr+W-C:H+a-C:H, Cr+WC-C:H, GLC, Al-Sn-Cu，MoS2, etc.Cr+W-C:H+a-C:H, Cr+WC-C:H, GLC, Al-Sn-Cu，MoS2Cr+W-C:H+a-C:H, Cr+WC-C:H, GLC, Al-Sn-Cu，MoS2
Footprint DWH (mm)4600x2300x20004600x2300x2300 4600x2300x2500
Download DLC Coating Equipment Catalogue

The configuration of SET plasma enhancement technology facilitates the dissociation of carbon source gases such as C2H2, CH4, etc., and the preparation of low friction coefficient, higher hardness, low a-C:H, a-C:Si DLC coatings and WCC coatings.

Specificities

  • 4 magnetron sputtering cathodes for the preparation of nitride and carbide films
  • Non-equilibrium closed magnetic field can be configured. High-density, low-energy bombardment ions are used for deposition coating, with good coating density, low columnar crystal structure and low internal stress.
  • Ion Beam Enhanced PECVD Technology for Carbon Films with Faster Deposition Rates
  • Vertical loading, more convenient product loading
  • High Performance UBM Sputtering Sources
  • Filament Argon Ion Etching Source
  • Turbomolecular pump*2

Hardware

  • German PC Intelligent Systems
  • Touch screen control
  • Data logging and real-time display of process parameters and flows
  • Automatic process control
  • Remote diagnostics and maintenance
  • Access to digital management systems
DLC黑色齿轮

Highly customizable DLC membrane system – adjustable parameters

The hardest substance in nature is diamond (sp3 bond), while graphite (sp2 bond) is one of the softest substances.DLC is a diamond-like amorphous carbon substrate mixed with sp3 and sp2 bonds.The more SP3 bonds, the harder the DLC, and the opposite, the softer it is.DLC coatings are usually used for high hardness and self-lubrication, corrosion resistance, insulation, light absorption and other working conditions. In order to realize more diversified functional requirements, doping with other elements such as Si, F, B, W, Ta, etc. can realize various purposes such as super lubrication, high temperature resistance, anti-adhesion, stress reduction, and so on

黑色滚柱轴承

Self-lubricating applications

DLC coatings are available in hydrogen-containing, non-hydrogen-containing, elementally doped, low-temperature, high-temperature, etc.; they are widely used in various types of precision sliding components.
轮胎模具涂层

Anti-tacky mold applications

Good anti-adhesion and hydrophobicity for aluminum alloy, copper, insulating varnish and polymer materials.
DLC牙钻

Medical Device Applications

DLC high hardness and wear-resistant anti-corrosion. Good biocompatibility and bio-assisted healing; carbon film system is an ideal medical layer.
DLC耐磨装饰镀

Wear-resistant decorative plating

High-end decorative plating, for wear resistance, life. Biocompatibility and other higher requirements; Naxau DLC is commonly used in smart wear, car parts
芯片-半导体涂层

Protection applications

DLC film thickness is dense and corrosion resistant. Characterized by hydrophobicity and single element, it can be widely used in various types of protective coatings.

Sputtering coating Industry Applications

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Dual-etching technology for dramatically improved bonding：

Based on more than 20 years of continuous operation and improvement, Naxau has developed a plasma etching technology SET and CET. Proper etching of the tool surface to achieve a clean and revitalized interface prior to coating is critical to a successful coating result. Etching requires the removal of surface contaminants such as metal oxides, water vapor, micro-oils and sweat debris. Etching also reactivates the surface and opens up molecular chains to induce ionic bonding during the coating process.

turnkey project

turnkey project

One-stop shop for vacuum coating equipment, coating process, peripheral production equipment suggestions, personnel training, plant planning, and other complete coating plant mass production program.

Personnel trainingMake it available to customers; or technical engineers on board
Joint ventureMultiple equipment purchase options, such as leasing, joint ventures, etc.
P系列DLC真空镀膜机

Naxau vacuum coating equipment is one of the industry’s most reliable production outputs. Multiple plasma deposition technologies can be compounded on a single machine.

Flexible productionDLC, ta-C carbon film, metal sputtering, equipment size, number of chambers, component configuration, furnace loading customization
Carbon film with adjustable film system parametersFrom ultra-soft GLC, to ultra-hard ta-C, as well as ultra-lubricious, abrasion-resistant, temperature-resistant, and thickened; the P-Series allows for the deposition of highly customized film systems.

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