纳狮真空镀膜设备-Naxau IE纳米涂层加工

涂层性能

纳狮涂层向导

涂层膜厚(μm)摩擦系数耐氧化温度颜色显微硬度(HV)
TiN2~70.4500Gold2,300
TiCN2~40.25400Grey3,000
AlTiN2~40.6900Blue-Black3,300
TiAlN2~40.6800Violet-Black3,200
AlCrN2~70.5900Blue-Black3,300
AlTiCrN2~40.5850Blue-Grey3,300
AlTiSiN2~40.451000Red-Brown3,500
TiSiN2~40.55800Grey3,000

镀膜结构

TiAlN 涂层

硬度测试数据 HK 0.025

1st 2st 3st
Data1 3289 3172 3172
Data2 3289 3172 3172
Data3 3172 3289 3172
Average 3250 3211 3172
M3(HK) 3211

Scratch test, 70N

TiAlSiN 涂层

硬度测试 HK 0.025

1st 2st 3st
Data1 3550 3543 3689
Data2 3550 3550 3689
Data3 3550 3689 3550
Average 3585 3594 3642
M3(HK) 3595

AlCrN 涂层

Thickness 2.43um

Indentation 150KG

硬度 HK 0.025

1st
2st 3st
Data1 3386 3245 3386
Data2 3386 3118 3251
Data3 3536 3124 3386
Average 3436 3162 3341
M3(HK) 3313

PVD coating film hardness test 03