Product Specifications
| Items | ||||||||||
| DC (1Ch) | DC (2Ch) | |||||||||
| EnerStream 5 | EnerStream 10 | EnerStream 10H | EnerStream 20 | EnerStream 20H | EnerStream 30 | EnerStream 30H | EnerStream 60 | EnerStream 5D | EnerStream 10D | |
| Input | 3⌀ 208V/ 220V/ 380V | 3⌀ 208V/ 220V/ 380V | 3⌀ 208V/ 220V/ 380V | 3⌀ 220V/ 380V | 3⌀ 220V/ 380V | 3⌀ 380V/ 440V | 3Φ⌀ 440V | 3⌀ 440V | 3⌀ 380V | 3⌀ 380V |
| lgnition Voltage | 1500V | 1500V | 1500V | 1500V | 1500V | 1500V | 1500V | 1500V | 1500V | 1500V |
| Output | 800V, 6.25A / 400V, 12.5A | 800V, 12.5A / 400V, 25A | 1000V, 10A / 500V, 20A | 800V, 25A/ 400V, 50A | 1000V, 20A / 500V, 40A | 800V, 37.5A / 400V, 75A | 1200V, 25A / 545V, 55A | 900V, 66.6A / 400V, 150A | 800V, 6.25A / 400V, 12.5A | 800V, 12.5A/ 400V, 25A |
| Output Power | DC 5kW | DC 10kW | DC 10kW | DC 20kW | DC 20kW | DC 30kW | DC 30kW | DC 60kW | DC 5kW + 5kW | DC 10kW + 10kW |
| Arc Energy | Less than 0.5mJ/kW | Less than 0.2mJ/kW | Less than 0.5mJ/kW | |||||||
| Interface | RS-232 / RS-485(Option: DeviceNet, ProfiBus) | |||||||||
| Size(mm) | 133(H) x 483(W) x 605(D) | 133(H) x 483(W) x 605(D) | 133(H) x 483(W) x 605(D) | 133(H) x 483(W) x 605(D) | 133(H) x 483(W) x 605(D) | 177(H) x 483(W) x 655(D) | 177(H) x 483(W) x 655(D) | 309(H) x 483(W) x 783(D) | 133(H) x 483(W) x 655(D) | 133(H) x 483(W) x 655(D) |
| Weight(kg) | 24.5 | 24.5 | 24.5 | 30.5 | 30.5 | 38.8 | 38.8 | 80 | 32 | 32 |
| Cooling | Air-Cooled | |||||||||
Pulsed DC Waveform to Maximize Dionization
- Benefits
Rapid increase of current induced by change in reignition voltage : 700V → 1000V - Adjustable reignition voltage : 50V ~ 300V
Product Specifications
| Items | Reverse Boltage Fixed | Reverse Voltage Adjustable | Reverse Voltage Fixed | ||||||||
| EnerPulse 5 | EnerPulse 10 | EnerPulse 10LV | EnerPulse 10M | EnerPulse 20 | EnerPulse 15N | EnerPulse 20N | EnerPulse 30 | Pulse 20 (ES20 + PG20) | Pulse 30 (ES30 + PG30) | Pulse 40 (2 x ES20 + PG40) | |
| Input | 3Φ 208V/ 220V/ 380V | 3Φ 208V/ 220V/ 380V | 3Φ 380V | 3Φ 380V | 3Φ 220V/ 380V/ 440V | 3Φ 440V | 3Φ 220V/ 440V | 3Φ 208V/ 440V | 3Φ 220V/ 380V | 3Φ 380V/ 440V | 3Φ 220V/ 380V |
| lgnition Voltage | 1500V | 1500V | 1500V | 1500V | 1200V | 1200V | 1200V | 1200V | 1500V | 1500V | 1500V |
| Output | 800V, 6.25A / 400V, 12.5A | 800V, 12.5A / 400V, 25A | 650V, 15.4A / 300V, 33.A | 800V, 12.5A/ 400V, 50A | 650V, 30A / 400V, 50A | 1000V, 15A / 500V, 40A | 900V, 22.2A / 500V, 40A | 900V, 33.3A / 400V, 75A | 800V, 25A / 400V, 50A | 800V, 37.5A/ 400V, 75A | 800V, 50A/ 400V, 100A |
| Output Power | Unipolar Pulse 5kW | Unipolar Pulse 10kW | Unipolar Pulse 10kW | Unipolar Pulse 10kW | Unipolar Pulse 20kW | Unipolar Pulse 15kW | Unipolar Pulse 20kW | Unipolar Pulse 30kW | Unipolar Pulse 20kW | Unipolar Pulse 30kW | Unipolar Pulse 40kW |
| Output Frequency | 20 ~ 150 kHz | 5 ~ 350 kHz | 20 ~ 100 kHz | 20 ~ 350 kHz | 20 ~ 150 kHz | 40 ~ 100 kHz | 40 ~ 80 kHz | ||||
| Reverse Time | Dc mode, 1.0us ~ 10us | DC mode, 1.0us ~ 5us | DC mode, 1.0us ~ 8us | DC mode, 1.0us ~ 5us | |||||||
| Arc Energy | Less than 1mJ/kW | Less than 0.5mJ/kW | Less than 1mJ/kW | ||||||||
| Interface | RS-232 / RS-485(Option: DeviceNet, ProfiBus) | ||||||||||
| Size(mm) | 133(H) x 483(W) x 605(D) | 133(H) x 483(W) x 605(D) | 133(H) x 483(W) x 605(D) | 133(H) x 483(W) x 605(D) | 177(H) x 483(W) x 700(D) | 177(H) x 483(W) x 782(D) | 221.25(H) x 483(W) x 700(D) | 309(H) x 483(W) x 782(D) | 133(H) x 483(W) x 605(D)_PG | 133(H) x 483(W) x 605(D)_PG | 133(H) x 483(W) x 605(D)_PG |
| Weight(kg) | 29.5 | 29.5 | 29.5 | 29.5 | 40 | 42 | 50 | 73 | 28 | 32 | 32 |
| Cooling | Air-Cooled | ||||||||||
※ Cable Duct + 129mm
※ Specifications subject to change without notice
Bipolar Pulsed DC Power Supplis for Dual Magnetron Sputtering & PECVD
